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Micro Flow Sensors
....Several micromachine-based
flow sensors have been developed in MML, including (1)
micro flow rate sensors, (2) micro humidity sensors,
(3) micro oxygen gas sensors, (4) micro temperature
sensors, and (5) micro pressure sensors. The detail
information could be found in our publication list.
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No. 101, Section 2, Kuang-Fu Road, Hsinchu, Taiwan 30013, R.O.C.
Department of Power Mechanical Engineering National Tsing Hua University
Microfluidic Biochips Lab
TEL:+886-3-5175131 ext.33765, +886-3-5742834 FAX:+886-3-5722840
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