Micro Flow Sensors

....Several micromachine-based flow sensors have been developed in MML, including (1) micro flow rate sensors, (2) micro humidity sensors, (3) micro oxygen gas sensors, (4) micro temperature sensors, and (5) micro pressure sensors. The detail information could be found in our publication list.

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• A Novel Micromachined Flow Sensor Using Periodic Flapping Motion of a Planar Jet Impinging on a V-shaped Plate