(MEMS) is a rapidly developing technology with promising
applications to optical switching fabrics, optical sensors,
displays, micro-actuators etc. The purpose of the study
is to utilize MEMS technology to fabricate miniature
optical components and systems for optical MEMS applications.
Major tasks include (1) The shape and thermal effects
of metal films on stress-induced bending of micromachined
bilayer cantilever (2) A high performance electrostatically-actuated
multi-switch optical crossconnect (OXC) with stress-induced
bending micromirrors and (3) Projection Display Technique
Utilizing Three-Color-Mixing Waveguides and Micro Scanning
....We have investigated
the behavior of several micro actuators, including Reflection
optical grating, Optical switch, corner mirror, 2D optical
scanner and Fresnel lens. The outcomes will assure us
to integrate these actuators on the design of micro
mirrors. We also design several mirrors for testing,
including reflection mirrors and grating mirrors. We
have built up capability to fabricate micro acutators
and micro mirrors. The free-space OXC is one of the
key components for all-optical networking (AON). This
is a rapidly evolving mainstream component that enables
the switching and routing in dense wavelength division
multiplexing (DWDM) networks and AON. A novel type of
micromachined bimorph is developed to enable optical
switching action in free-space with the advantages of
accurate angular alignment, high switching speed, long-term
reliability and small switch size. At last, an integrated-optical
three-color-mixing projection display system is demonstrated.
The three-color-mixer fabricated by using a low-cost
process has been successfully used for color image generation.
The development of the proposed project display technology
could be promising for integrated optics.