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【 Citations: 30 】
2006-05-09

Title: A NEW FABRICATION PROCESS FOR ULTRA-THICK MICROFLUIDIC MICROSTRUCTURES UTILIZING SU-8 PHOTORESIST
Authors: LIN CH; LEE GB; CHANG BW; CHANG GL
Source: J MICROMECHANIC MICROENGINEER 12 (5): 590-597 SEP 2002
Addresses: Natl Cheng Kung Univ, Inst Biomed Engn, Tainan 701, Taiwan.
Natl Cheng Kung Univ, Dept Engn Sci, Tainan 701, Taiwan.


Field: ENGINEERING